Редактор Ибратжон Хатамович Алиев
Редактор Боходир Хошимович Каримов
Редактор Оббозхон Хакимович Кулдошев
Рецензент, доктор физико-математических наук, профессор Ферганского политехнческого института Носиржон Хайдарович Юлдашев
Рецензент, кандидат технических наук, доцент физико-технического факультета Ферганского государственного университета Якуб Усманович Усмонов
Иллюстратор Ибратжон Хатамович Алиев
Иллюстратор Боходир Хошимович Каримов
Иллюстратор Салим Мадрахимович Отажонов
Дизайнер обложки Ибратжон Хатамович Алиев
Дизайнер обложки Боходир Хошимович Кримов
Дизайнер обложки Салим Мадрахимович Отажонов
Корректор Ибратжон Хатамович Алиев
Корректор Боходир Хошимович Каримов
© Салим Мадрахмович Отажонов, 2022
© Нодир Эсоналиевич Алимов, 2022
© Ибратжон Хатамович Алиев, иллюстрации, 2022
© Боходир Хошимович Каримов, иллюстрации, 2022
© Салим Мадрахимович Отажонов, иллюстрации, 2022
© Ибратжон Хатамович Алиев, дизайн обложки, 2022
© Боходир Хошимович Кримов, дизайн обложки, 2022
© Салим Мадрахимович Отажонов, дизайн обложки, 2022
ISBN 978-5-0059-1351-7
Создано в интеллектуальной издательской системе Ridero
Физические свойства и механизм образования фото-ЭДС в пленках А>2В>6 исследовались во многих работах [2—7], но глубокие уровни в них почти не изучались. В то же время, комплексное изучение фото-ЭДС и фотопроводимости позволяет определить не только энергии их активации, но и свойства межкристаллических барьеров вдоль слоя, а также их различия на поверхности и в глубине слоя. В данной главе рассмотрим структуру края поглощения пленок, что необходимо для упрощения анализа спектров фотопроводимости и тока короткого замыкания, а также систематизируем электрофизические свойства слоев, полученных с разной скоростью конденсации. Будут рассмотрены и некоторые простые феноменологические модели этих слоев. В конце главы сделана попытка построить более реальную модель АФН-пленки и теорию образования АФН в косо напылённых поликристаллических пленках в области собственного и примесного поглощения света.
§1. Край поглощения света тонких пленок CdTe с глубокими уровнями
Изучение спектральных зависимостей оптических постоянных в области края поглощения является весьма эффективным методом исследования особенностей дефектности строения энергетических зон в тонких пленках. В связи с этим нами были измерены коэффициенты пропускания (Т) при перпендикулярном освещении слоев теллурида кадмия, полученных при разных скоростях конденсации. Как известно, коэффициент пропускания зависит от оптических постоянных: показателя преломления пленок (n) и коэффициента экстинкции (k), толщины пленки (d), длины волны света (λ), а также от показателя преломления подложки (n>1).
На рис.1. представлена зависимость T от энергии кванта света (hν) для пленок CdTe: Ag, полученных при разных скоростях конденсации (см. табл.1.).
Из рисунка видно, что в длинноволновой области спектра в пленках наблюдается интерференция. Для пленок, полученных со скоростью конденсации 0.2 и 1.73 нм/c в области спектра hν = 0.5—1.0 эВ, T>max достигает 90—97%. При скоростях конденсации 2.5 нм/с T>max и T>min интерференции уменьшаются (кривая 3) и T>max достигает 30% в длинноволновой области спектра. В пленках, полученных при сравнительно больших скоростях 2,53 нм/с, интерференция наблюдается только в области 2—2.5 мкм, а T>max в этой области достигал 20%. Отсюда следует, что с увеличением скорости конденсации коэффициент пропускания уменьшается.
Далее с использованием метода огибающих функций максимумов и минимумов интерференции, изложенного в главе II, мы определяли показатель преломления, толщину пленок d, значения которых приведены в таблице 1 и являются несущественно меньшими, чем в монокристаллах n =2.7 при λ=1.5 мкм [25], что совпадают данным полученным, для пленок CdSe [26].
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Кроме того, толщина пленок определялась с помощью микроинтерферометров МИИ – 4 и МИИ – 9 посредством смещения интерференционных полос, возникающих при отражении света от поверхности слоя и подложки. Величина d, вычисленная по формуле (2.5.10) совпадает по погрешности с измеренной на МИИ – 4 и МИИ – 9. Затем, зная значения n, d, мы определяли коэффициент поглощения () c помощью формулы (2.5.8) и представили их зависимости от hν на рис. 2. Как видно, в спектрах поглощения света в этих пленках имеется явно выраженная примесная полоса поглощения. В области (1.46—1.5) эВ поглощение света почти совпадает с данными для монокристаллов (имеется длинноволновый сдвиг около 0.02 эВ) и соответствует собственной полосе поглощения. Длинноволновый сдвиг может быть объяснен внутренним механическим напряжением в пленке 2.5·10>8 Па, если использовать для барического коэффициента изменения ширины запрещенной зоны значение эВ· см>2/кГ [24]. Далее имеется одна более явно выраженная полоса с красной границей около 1.3 эВ и другая, не подающаяся надежной расшифровке, в которой коэффициент поглощения уменьшается от порядка 10>3 до 10>2см>-1 в области 0.7—1.3 эВ (рис.2). Обе эти полосы связаны с поглощением света глубокими центрами.
Отметим, что в исследуемых нами пленках поглощение в примесной области вблизи края поглощения достаточно большое 10>4см>-1, как и при собственном поглощении обусловливает пространственно неоднородное возбуждение носителей.
§2. Некоторые общие соображения о спектральном распределении фотоЭДС и фотопроводимости
Анализ спектров фотопроводимости (ФП) и фото-ЭДС проведен, поддерживаясь следующих общеизвестных положений:
а) если толщина полупроводника превышает длину диффузии неравновесных носителей, то при возбуждении сильно поглощаемым светом ФП определяется скоростью генерации и рекомбинации носителей в области генерации носителей (когда
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то в слое толщиной, равной длине диффузии носителей, можно пренебречь изгибом зон на поверхности). В тех же условиях фото-ЭДС генерируется на барьерах в той же области, а результирующая ЭДС на контактах определяется эффективной схемой образца. На краю поглощения, когда свет слабо поглощается, в объеме возможно как увеличение фотопроводимости, если скорость рекомбинации на поверхности больше, чем в объеме, так и уменьшение, когда уменьшается скорость генерации носителей из-за увеличения прозрачности образца. Переход к примесной фотогенерации носителей будет выявляться, если меняется время их жизни. Если носители возбуждаются из мелких уровней, из которых происходит быстрая термическая активизация неравновесных носителей, то в этих условиях генерация фото-ЭДС при собственном и примесном поглощении определяется только свойствами области поглощения света;
б) если толщина образца меньше длины диффузии, то возбужденные как в объеме, так и на поверхности носители будут рекомбинировать на тех же центрах, которые захватывают не основные носители. При переходе к примесной генерации носителей может меняться их время жизни и, как в первом случае, возможны особенности, связанные со свойствами глубоких уровней (характером конкуренции различных каналов рекомбинации при наличии термической генерации не основных носителей).